JPH0478497U - - Google Patents
Info
- Publication number
- JPH0478497U JPH0478497U JP12022690U JP12022690U JPH0478497U JP H0478497 U JPH0478497 U JP H0478497U JP 12022690 U JP12022690 U JP 12022690U JP 12022690 U JP12022690 U JP 12022690U JP H0478497 U JPH0478497 U JP H0478497U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- heating plate
- heating
- heating device
- transporting means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 230000032258 transport Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Tunnel Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12022690U JP2511692Y2 (ja) | 1990-11-19 | 1990-11-19 | 基板の加熱装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12022690U JP2511692Y2 (ja) | 1990-11-19 | 1990-11-19 | 基板の加熱装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0478497U true JPH0478497U (en]) | 1992-07-08 |
| JP2511692Y2 JP2511692Y2 (ja) | 1996-09-25 |
Family
ID=31868141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12022690U Expired - Fee Related JP2511692Y2 (ja) | 1990-11-19 | 1990-11-19 | 基板の加熱装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2511692Y2 (en]) |
-
1990
- 1990-11-19 JP JP12022690U patent/JP2511692Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2511692Y2 (ja) | 1996-09-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |